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SMV-2023-40: Characterization of sources and optical elements of coherent optics and use for commercial devices
Holá, Miroslava ; Řeřucha, Šimon ; Pravdová, Lenka ; Čížek, Martin
The contract research was focused on the characterization of the laser source. The characterization of the laser source was divided into two parts. The first part was focused on characterizing the optical frequency of the laser source for at least 100 hours with a resolution better than 100kHz. The second part concerned the zero-drift characterization of a common-path differential interferometer. It was a measurement of interference phase fluctuations during the reflection of interferometer arm beams on a common mirror (zero-drift) lasting at least 100 hours with a resolution better than 1 nm for a pair of differential interferometers with simultaneous measurement of atmospheric parameters.
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SMV-2023-39: Controller for the distance measuring probe
Holá, Miroslava ; Řeřucha, Šimon ; Čížek, Martin ; Pavelka, Jan ; Hucl, Václav
Measurements using a laser interferometer are among the most accurate types of distance measurements. In order to achieve this goal, it is necessary not only to have a precise laser source and an interferometer but also a controller, which ensures the correct recording and reading of the experimental data. The contract research „Controller for a distance measuring probe“ was focused on the realization of such a controller. The controller contains several service modules which ensure correct recording and reading of measured data and several related accessories. It reads and records data from a laser interferometer and also from a module which records atmospheric data necessary for the measured distance determination.
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Advanced Interferometric Methods of Coordinates Measurement
Holá, Miroslava ; Klapetek,, Petr (referee) ; Mrňa, Libor (referee) ; Lazar, Josef (advisor)
This thesis addresses particular topics in the field of the length metrology for nanometrology. Nanometrology deals with dimensional measurements of micro- and nanostructures with a high spatial resolution. It typically combines a microscope imaging with a precise coordinate measurement, usually capable of nanometre resolution using the state-of-art laser interferometry techniques. The development in this field is driven, among others, by emerging advanced nanotechnologies that demand to push further the capabilities and limits of the interferometric techniques to make the nanometre-level dimensional measurement of nanostructures possible. The principal limitations of current systems are the environmental conditions and especially the fluctuations in the refractive index of air. The theoretical part of this thesis aim at analysis of individual parts of laser interferometer. I oriented myself on the study of their advantages/disadvantages and further also the possibilities of their industrial applications. The second part of the thesis presents my work that focused on the influence of the refractive index of air (RIA) on the measurement uncertainty. I experimentally demonstrated an interferometric system with a self-cancellation RIA fluctuations: a transparent photodetector is used for the measurement of the standing wave along the axis of a passive resonator, where the resonator also serves as a reference for the laser wavelength stabilisation. Another optical arrangement, based on a setup of several Michelson interferometers, represents a combination of an interferometer and a refractometer into a single system. This setup was used to study the behaviour of the ambient airflow with respect to the optical path difference and physical separation of the interferometer’s and refractometer’s path. Based on the experimental results I proposed new arrangements for shape measuring interferometers, which combine length interferometry and a tracking refractometer for the direct compensation of RIA fluctuations with geometrically adjacent optical beams. The results indicate an improvement in RIA fluctuation induced uncertainty by a factor of 100. Third part describes the design and implementation of interferometric systems for specific applications. For the industrial environment I developed a compact interferometric displacement gauge which is designed to allow nanometre level measurement using a simplified interferometer construction. For coordinate measurement of the position of the sample up to six degrees of freedom, I realised a compact modular interferometric system, which represents a unique setup together with a stabilised laser source. To measure the position of the sample in an electron beam writer chamber, I designed and implemented a differential interferometer that works in the near infrared domain and uses a new detection method developed for this system. In the fourth part I describe the realisation of a high-speed interferometer with a differential arrangement, which allows evaluation of high-cycle fatigue in material engineering. This method of studying high-cycle fatigue should be beneficial for both the basic research and the engineering practice.
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Characterization and elimination of thermomechanical effects in interferometric length measurement
Řeřucha, Šimon ; Holá, Miroslava ; Lazar, Josef ; Mikel, Břetislav ; Číp, Ondřej
Continuous efforts to develop dimensional measurements at both the nano- and macro-scale continue to present challenges in extending high-precision measurement procedures from the well-controlled experimental environment of a typically single measurement cycle to a constant-load production environment. In the field of laser interferometry, which is both a cornerstone of length metrology in general and an essential part of nanometrology, we have focused on long-term measurement stability (so-called zero-drift) in measurement scenarios and applications based on (mostly laser) interferometry. A well-characterized and compensated measurement zero-drift in such applications becomes more important both with applications in less controlled environments and with increasing measurement timeframes, such as long scans in microscopic nanometrology, long exposures in electron lithography, or interferometric reference calibrations with a larger number of calibration points or repetitions. The goal of the current research effort is to comprehensively investigate error effects and contributions to measurement uncertainty related to zero-drift in laser interferometry-based applications, with a particular focus on temperature effects (as these typically appear to be the dominant contribution) and approaches to suppress them. This effort involves several complementary directions.
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Frequency references and dissemination
Hrabina, Jan ; Pravdová, Lenka ; Šarbort, Martin ; Čížek, Martin ; Holá, Miroslava ; Oulehla, Jindřich ; Pokorný, Pavel ; Lazar, Josef ; Číp, Ondřej
The work deals with an overview of research topics of the “Frequency references and dissemination” group, Department of Coherence Optics, Institute of Scientific Instruments, Czech Academy of Sciences. These topics include frequency locking of lasers by laser spectroscopy and high-finnese optical cavities, digital holography and optical frequency tranfers through fiber and free-space optical links.
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