National Repository of Grey Literature 1 records found  Search took 0.01 seconds. 
Hybrid reactive HiPIMS deposition system for the deposition of functional metal oxide thin films
Hubička, Zdeněk ; Čada, Martin ; Olejníček, Jiří ; Kšírová, Petra ; Tvarog, Drahoslav
The report describes a hybrid reactive HiPIMS deposition system for the deposition of functional metal oxide thin films with defined optical properties.

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