Home > Search Results: Urbánek, Ivan
Search:
Search Tips :: Advanced Search
Search collections:
Sort by: Display results: Output format:
National Repository of Grey Literature 2 records found  Search took 0.00 seconds. 
Improvement of IBAD apparatus
 Urbánek, Ivan ; Nebojsa, Alois (referee) ; Spousta, Jiří (advisor)
This thesis is divided into three main parts dealing with ion beam assisted deposition. In the first part there is a brief description of the IBAD chamber at Institute of Physical Engineering of BUT. There is also a detailed description of control of the IBAD apparatus during deposition. Next part deals with measuring of deposition rates of ion sputtering in order to refine deposition of thin layers. Last part deals with planned and already finished changes that should improve quality and speed of thin layers deposition. Changes include the option of covering the substrate holder, change of the entry flange, design of new insertion chamber with multifunctional substrate holder and the option to control the deposition by computer.
Detailed record
Improvement of IBAD apparatus
 Urbánek, Ivan ; Nebojsa, Alois (referee) ; Spousta, Jiří (advisor)
This thesis is divided into three main parts dealing with ion beam assisted deposition. In the first part there is a brief description of the IBAD chamber at Institute of Physical Engineering of BUT. There is also a detailed description of control of the IBAD apparatus during deposition. Next part deals with measuring of deposition rates of ion sputtering in order to refine deposition of thin layers. Last part deals with planned and already finished changes that should improve quality and speed of thin layers deposition. Changes include the option of covering the substrate holder, change of the entry flange, design of new insertion chamber with multifunctional substrate holder and the option to control the deposition by computer.
Detailed record

See also: similar author names
2 Urbánek, Ivo
Interested in being notified about new results for this query?
Subscribe to the RSS feed.
Digital Repository :: Search :: Submit :: Personalize :: Help
Powered by Invenio v1.1.2
Maintained by admin.invenio@techlib.cz
This site is also available in the following languages:
Česky  English