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National Repository of Grey Literature 2 records found  Search took 0.04 seconds. 
An influence of electron beam on thin oxide films
 Kostyal, Michal ; Průša, Stanislav (referee) ; Čechal, Jan (advisor)
This bachelor work deals with a study of the influence of electron beam of scanning electron microscope on the surface of the SiO2/Si (100) – sample. In the work the electron and atomic force microscopy briefly described. The main objective of experimental part is to describe variation in the brightness of sample SiO2/Si (100) in Scanning electron microscope images. In this study is found that on the sample surface are created objects few nm high. The rest of the work is then devoted to measuring the dependence of the object’s high on different variables. Experiments are generally based on the selective irradiation of the sample surface by scanning electron microscope, measurement of irradiated parts using atomic force microscope and evaluation in the application Gwyddion.
Detailed record
An influence of electron beam on thin oxide films
 Kostyal, Michal ; Průša, Stanislav (referee) ; Čechal, Jan (advisor)
This bachelor work deals with a study of the influence of electron beam of scanning electron microscope on the surface of the SiO2/Si (100) – sample. In the work the electron and atomic force microscopy briefly described. The main objective of experimental part is to describe variation in the brightness of sample SiO2/Si (100) in Scanning electron microscope images. In this study is found that on the sample surface are created objects few nm high. The rest of the work is then devoted to measuring the dependence of the object’s high on different variables. Experiments are generally based on the selective irradiation of the sample surface by scanning electron microscope, measurement of irradiated parts using atomic force microscope and evaluation in the application Gwyddion.
Detailed record

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