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Comparative study on functionalization of NCD films with amine groups
 Artemenko, Anna ; Kozak, Halyna ; Stuchlík, Jiří ; Biederman, H. ; Kromka, Alexander
Two plasma-based processes for functionalization of oxygen or hydrogen terminated NCD surfaces with amino groups were compared. The first process was based on deposition of thin (8 nm) amine containing plasma polymer by RF magnetron sputtering of Nylon target in Ar/N-2 working gas mixture. RF plasma treatment in NH3 for 10 minutes was used in the second process. The properties of NCD films before and after amination were characterized by scanning electron microscopy (SEM), wettability measurements, spectral ellipsometry, X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and current-voltage (I-V) measurements. The presence of nitrogen (and thus amino groups) on the surface was confirmed by XPS measurements in both cases. The obtained results indicated that NCD surface functionalization from amine containing plasma polymer by RF magnetron sputtering is an alternative technological solution for successful functionalization of diamond surfaces for biosensor applications.
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