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Světelný kolektor pro vzdušnou fluorescenci a také pro rozptyl záření na nečistotách křemíkových desek Palatka, Miroslav ; Schovánek, Petr ; Hrabovský, Miroslav ; Nožka, Libor ; Řídký, Jan ; Boháčová, Martina Air fluorescence is defined as photons produced by charged particles in the air. The excited molecules emit light in the near UV and in the visible region between 300 nm and 400 nm. The simple light collection system for laboratory analysis of the fluorescence signal is presened. The optical layout of Surfscan 4500 (KLA-Tencor) is described and very high similarity between it and fluorescence colection system is shown. Detailed record

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