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High temperature alloying of high power semiconductor devices
Straškraba, Vojtěch ; Szendiuch, Ivan (referee) ; ABB, Vladimír Andrš, (advisor)
The thesis deals with study of high-temperature alloying process of power semiconductor devices. Mechanical durability and loss heat extraction is achieved via contacting silicon devices on molybdenum electrode in vacuum alloying furnace. Properties of alloy contact determine electrical, geometrical and mechanical parameters of device and are related with durability of device under heavy load during operation in various industrial machines or transport vehicles. Process parameters are evaluated in terms of input materials and their preparation along with temperature ramp profile and conditions in vacuum furnace. Test samples are analyzed to assess their electrical and geometrical parameters and selected samples underwent element analysis of alloy contact. Optimal process parameters are estimated according to analysis of experiments.

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