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Experimental validation of the parasitic RC components extraction (PEX extraction) using ring oscillators
Buzek, Vít ; Král, Vojtěch (referee) ; Hejátková, Edita (advisor)
The main focus of this work is verification of extraction of parasitic RC components. The theoretical part is concerned with theoretical terms from the area of design of integrated circuits, ring oscillators, parasitic extraction and frequency counting are clarified. The practical section is dedicated to measuring at manufactured structures on a silicon wafer and simulation, which simulates the designed structures in Cadence Virtuoso. For the parasitic extraction to be verified, it is necessary to compare the measured and simulation frequencies, to find out the deviations and to point out configurations with limited accuracy. Section of the practical part is dedicated to statistical analysis and suggestion on improving the parasitic extraction.

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