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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Passivation of germanium surface using ALD
 Kuba, Jakub ; Polčák, Josef (referee) ; Kolíbal, Miroslav (advisor)
The thesis deals with passivation of germanium surfaces by chemical etching and atomic layer deposition (ALD). Attention was paid to the rate of oxidation of germanium surfaces after selected passivation methods and the composition of the germanium suboxides. In the thesis selected methods for germanium oxide removal are reviewed and a brief description of the methods used for analysis (XPS) and thin film deposition (ALD) is given.
Detailed record
Passivation of germanium surface using ALD
 Kuba, Jakub ; Polčák, Josef (referee) ; Kolíbal, Miroslav (advisor)
The thesis deals with passivation of germanium surfaces by chemical etching and atomic layer deposition (ALD). Attention was paid to the rate of oxidation of germanium surfaces after selected passivation methods and the composition of the germanium suboxides. In the thesis selected methods for germanium oxide removal are reviewed and a brief description of the methods used for analysis (XPS) and thin film deposition (ALD) is given.
Detailed record

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