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Amorfní tenké vrstvy Ag-Sb-S připravené radiofrekvenčním magnetronovým naprašováním
Gutwirth, J. ; Wágner, T. ; Drašar, Č. ; Beneš, L. ; Vlček, M. ; Hrdlička, M. ; Frumar, M. ; Schwarz, J. ; Tichá, H. ; Peřina, Vratislav
Thin Ag-Sb-S films were prepared by RF magnetron sputtering as potential candidates for rewritable optical data storage films. There were prepared polycrystalline bulks of AgSbS2. Composition and homogeneity of these bulks were checked. Targets for RF magnetron sputtering were prepared from pulverized bulks by hot pressing technique. Targets were characterized the same way as bulks. Composition and homogeneity of prepared thin films were characterized by SEM-EDX and RBS/ERDA, amorphous/crystalline character was studied by XRD. Optical properties (spectral dependence of refractive index) were evaluated on basis of UV-Vis-NIR spectroscopy and variable angle spectral ellipsometry (VASE). Crystallization abilities were traced by thermal dependence of optical transmission of prepared thin films.
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