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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Thermal stability of sputtered yttrium oxide layers
 Kršňák, Jiří ; Boušek, Jaroslav (referee) ; Hégr, Ondřej (advisor)
This work deals with behavior of deposited yttrium oxide thin film after heat stress. Within solution thin yttrium oxide films were deposited at silicon substrates, which were exposed to various cycles of heat stress. Tested structures were investigated before and after heat stress in term of surface topography stability with the hepl of electron microscopy.
Detailed record
Thermal stability of sputtered yttrium oxide layers
 Kršňák, Jiří ; Boušek, Jaroslav (referee) ; Hégr, Ondřej (advisor)
This work deals with behavior of deposited yttrium oxide thin film after heat stress. Within solution thin yttrium oxide films were deposited at silicon substrates, which were exposed to various cycles of heat stress. Tested structures were investigated before and after heat stress in term of surface topography stability with the hepl of electron microscopy.
Detailed record

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