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National Repository of Grey Literature 1 records found  Search took 0.01 seconds. 
Application of pressurized hot water for etching of microfluidics
 Vašina, M. ; Grym, Jakub ; Foret, František
The subject of this study is a new method of glass etching and its application in microfluidics. Commonly, hydrofluoric acid is used for glass etching. In this study we have tested a new method of glass etching using pressurized hot water. Test motives were prepared using photolitography and metal sputtering on the glass substrate and the etching was performed in a newly developed device capable to compress and heat water to its critical point. Electron microscopy and profilometry have been used for analyzing the surface of the etched glass substrate.
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