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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Characterisation of dielectric films on a silicon wafer
 Fillner, Patrik ; Boušek, Jaroslav (referee) ; Hubálek, Jaromír (advisor)
This bachelor thesis focuses on thin oxide based dielectric layers on silicon wafer. Main effort is for characterization of properties of samples. This technology can be used for manufacturing capacitors on silicon chips. Samples are based on planar oxide layers made with thin film technology on single silicon wafers coated with electrodes deposited by evaporation or by sputtering.
Detailed record
Characterisation of dielectric films on a silicon wafer
 Fillner, Patrik ; Boušek, Jaroslav (referee) ; Hubálek, Jaromír (advisor)
This bachelor thesis focuses on thin oxide based dielectric layers on silicon wafer. Main effort is for characterization of properties of samples. This technology can be used for manufacturing capacitors on silicon chips. Samples are based on planar oxide layers made with thin film technology on single silicon wafers coated with electrodes deposited by evaporation or by sputtering.
Detailed record

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