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Fabrication and testing of MEMS device components for micromanipulation
Binková, Petra ; Prášek, Jan (referee) ; Liška, Jiří (advisor)
This diploma thesis deals with the production and testing of MEMS devices intended for micromanipulations with a possibility of their usage in a scanning electron microscope, which includes manipulation of microobjects such as metal microparticles, microfibres or even biological samples. The first chapter contains a detailed study of microsystems and MEMS devices. The next chapter describes various types of micromanipulations, including MEMS. The third chapter deals with possible techniques of microfabrication. The fourth chapter contains experimental part of this work, in which two versions of silicon microgrippers were proposed. Considering available solutions of micromanipulators, principal and spatial limitations in the electron microscope, the piezoelectric actuator was chosen as the gripping principle. Direct write laser lithography and deep reactive ion etching were used to produce the microgrippers, and it was necessary to optimize these techniques for selected application. During the optimizations, various problems were solved, including the elimination of black silicon formation, unsuccessful etching of narrow deep structures, etc. Prototype of one of the proposed microgripper was successfully created. The manufactured micromanipulators were subsequently tested under an optical microscope. During testing, it was necessary to modify the position of the actuator in the device to ensure that the jaws of the manipulator are clamped.

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