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National Repository of Grey Literature

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Zobrazování nevodivých vzorků pomocí nízkoenergiových zpětně odražených elektronů v SEM Wandrol, Petr Article deals with the problems of imaging of non-conductive samples in the SEM that are caused mainly by charging. Use of the low primary beam energy and the observation by means of backscattered electrons are proposed as methods of suppression of charging artifacts in the image. Newly developed detector of backscattered electrons for the low energy SEM is described and images of uncoated non-conductive samples without charging artifacts taken by this detector are presented. Detailed record

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