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SiOx based barrier coatings
Sedláček, Ondřej ; Dzik, Petr (referee) ; Přikryl, Radek (advisor)
The theme of this thesis is based on the preparation and characterization thin films prepared by methods like a Physical Vapor Deposition, Plasma Assisted Vapor Deposition and Plasma Enhanced Chemical Vapor Deposition. The elementary materials for the preparation of these layers are silicon monooxide powder, melamine and hexamethyldisiloxane. These layers have been prepared with regards to their usage like a barrier coatings with emphasis on poisonous organic substances resistance.. We made a characterization of these films. This characterization is consist of researching of their physical properties (the ability to resist permeation of certain organic compounds), and their chemical composition too. We used to some specific method for these characteristics, for example: FTIR, OTR, ellipsometry, SEM and measuring of the permeation of selected industrial pollutants resistance.
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SiOx based barrier coatings
Sedláček, Ondřej ; Dzik, Petr (referee) ; Přikryl, Radek (advisor)
The theme of this thesis is based on the preparation and characterization thin films prepared by methods like a Physical Vapor Deposition, Plasma Assisted Vapor Deposition and Plasma Enhanced Chemical Vapor Deposition. The elementary materials for the preparation of these layers are silicon monooxide powder, melamine and hexamethyldisiloxane. These layers have been prepared with regards to their usage like a barrier coatings with emphasis on poisonous organic substances resistance.. We made a characterization of these films. This characterization is consist of researching of their physical properties (the ability to resist permeation of certain organic compounds), and their chemical composition too. We used to some specific method for these characteristics, for example: FTIR, OTR, ellipsometry, SEM and measuring of the permeation of selected industrial pollutants resistance.
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