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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Preparation of semiconductor samples for transmission electron microscopy
 Bajo, Viktor ; Bukvišová, Kristýna (referee) ; Horák, Michal (advisor)
This bachelor thesis deals with the preparation of samples from semiconductors for transmission electron microscopy. In the theoretical part, the most common methods of pre-preparation and finishing methods used to create ultrathin regions transparent to the electron beam of the microscope are generally described. This is followed by an overview of the experimental equipment used in the practical part for the actual sample preparation. I prepared two single crystal silicon samples, one by mechanical preparation followed by ion polishing, the other in the form of a lamella fabricated using a scanning electron microscope equipped with a focused ion beam. Mechanical preparation is significantly more time-consuming, is performed on several specialised instruments and risks destruction of the whole object under investigation. Preparation of the lamellae is relatively fast and allows a very small area of interest to be selected, leaving the rest of the sample intact but, on the other hand, requires at least basic skills in scanning electron microscopy. Both methods can be used to prepare good quality samples suitable for analysis in a transmission electron microscope. I have documented the whole procedure in the practical section that can serve as a guide for the preparation of these samples.
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Mechanická příprava povrchu dřevěných součástí
 Hlaváček, Tomáš
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