Home > Search Results: keywords:"iontově asistované naprašování"
Search:
Search Tips :: Advanced Search
Search collections:
Sort by: Display results: Output format:
National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Fabrication and structuring of a thin vanadium dioxide layer for nanophotonics
 Spousta, Jiří ; Musálek, Tomáš (referee) ; Rovenská, Katarína (advisor)
Vanadium dioxide is becoming frequently used in tunable metasurfaces, mainly due to its easily achievable insulator to metal phase-transition, occuring at around 67°C. This thesis deals with the optimization of thin VO2 layer fabrication process and specifically with e-beam evaporation and ion beam-assisted sputtering. The phase change of VO2 layers was optically characterized -- mostly, we measured the thermally-dependent transmissivity of our layers. In ion beam-assisted sputtering, we implemented a new process for yielding thin VO2 layers which uses in situ annealing during the deposition. Layers fabricated with this newly implemented process demonstrate a clear phase transition typical for VO2.
Detailed record
Fabrication and structuring of a thin vanadium dioxide layer for nanophotonics
 Spousta, Jiří ; Musálek, Tomáš (referee) ; Rovenská, Katarína (advisor)
Vanadium dioxide is becoming frequently used in tunable metasurfaces, mainly due to its easily achievable insulator to metal phase-transition, occuring at around 67°C. This thesis deals with the optimization of thin VO2 layer fabrication process and specifically with e-beam evaporation and ion beam-assisted sputtering. The phase change of VO2 layers was optically characterized -- mostly, we measured the thermally-dependent transmissivity of our layers. In ion beam-assisted sputtering, we implemented a new process for yielding thin VO2 layers which uses in situ annealing during the deposition. Layers fabricated with this newly implemented process demonstrate a clear phase transition typical for VO2.
Detailed record

Interested in being notified about new results for this query?
Subscribe to the RSS feed.
Digital Repository :: Search :: Submit :: Personalize :: Help
Powered by Invenio v1.1.2
Maintained by admin.invenio@techlib.cz
This site is also available in the following languages:
Česky  English