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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Creation of plasmonic micro- and nanostructures by electron beam lithography
 Babocký, Jiří ; Dvořák, Petr (referee) ; Kvapil, Michal (advisor)
This beachelor’s thesis deals with a fabrication of plasmonic antennas using electron beam lithography. First section consists of summary of a technologies that can be used for production of metallic micro and nanostructures on silicon and glass substrate. Second section provides a description of electron beam lithography method and technologies that are used for it. Final part describes experiments, that were done and empiric model describing dependance of dimension of fabricated structures on lithographic parameters.
Detailed record
Creation of plasmonic micro- and nanostructures by electron beam lithography
 Babocký, Jiří ; Dvořák, Petr (referee) ; Kvapil, Michal (advisor)
This beachelor’s thesis deals with a fabrication of plasmonic antennas using electron beam lithography. First section consists of summary of a technologies that can be used for production of metallic micro and nanostructures on silicon and glass substrate. Second section provides a description of electron beam lithography method and technologies that are used for it. Final part describes experiments, that were done and empiric model describing dependance of dimension of fabricated structures on lithographic parameters.
Detailed record

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