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Special technical solutions in vacuum technology
SZABÓ, Robin
This thesis is focussed on the realisation of various technical solutions for microwave plasma apparatus. The theoretical part focuses on vacuum and general terms that are related. Attention was paid for example to definition of pressure, to pressure and central free track, units of measurement of pressure and their conversions. This part includes the classification of vacuum according to pressure. The next section of the dissertation is concerned with achieving vacuum including a description of rotary oil and turbo molecular pump. Part of the thesis includesa description of plasma microwave apparatus CX22 which was used during realisation of this dissertation. There is also a description of vacuum chamber, gas pump system, system of gas lead, microwave source, evaporator of liquid precursor and mixing apparatus. In the practical section a measurement of physical and technological quantity included. This part covers the inflow of apparatus measurement and temperatures of substrate during plasma process. In the next part there is a description of specific technical solutions suggested by the dissertation author. Amongst suggested technical solutions in this paper there is vacuum isolator, heating system of evaporator pipe, box of an evaporator of liquid precursor, ''gas ring'' and tablet equipment. Vacuum isolator was designed by 3D simulation and serves as a connection to detection technology. Heating of pipes of an evaporator were constructed to improve quality of the plasma process. The box of an evaporator was suggested for maintaining fresh air in a lab. A Gas ring was also designed by 3D simulation and serves as a specially adjusted pipe for bringing vapour of precursor near the substrate. The tablet equipment was constructed for unified preparation of compressed powder cellulosic tablets. Also from the available vacuum pumps, multilevel pumping was constructed that helped achievement of reduced lowest pressure.
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