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National Repository of Grey Literature 2 records found  Search took 0.00 seconds. 
Advanced techniques of micromachining
 Šalomoun, Vojtěch ; Prášek, Jan (referee) ; Pekárek, Jan (advisor)
Fabrication of micro-electro-mechanical systems (MEMS) requires advanced level of miniaturization, which is not achievable by technology used in microeletronics. Socalled micromachining covers many unique techniques of material processing to get microstructures with possible dimensions below 1 m. This bachelor’s thesis gives a general introduce to micromachining of MEMS. Its focus is on bulk and surface micromachining by wet and dry etching. The practical part contains design of microstructures, their manufacturing process and creation of computer models in CoventorWare suite.
Detailed record
Advanced techniques of micromachining
 Šalomoun, Vojtěch ; Prášek, Jan (referee) ; Pekárek, Jan (advisor)
Fabrication of micro-electro-mechanical systems (MEMS) requires advanced level of miniaturization, which is not achievable by technology used in microeletronics. Socalled micromachining covers many unique techniques of material processing to get microstructures with possible dimensions below 1 m. This bachelor’s thesis gives a general introduce to micromachining of MEMS. Its focus is on bulk and surface micromachining by wet and dry etching. The practical part contains design of microstructures, their manufacturing process and creation of computer models in CoventorWare suite.
Detailed record

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