National Repository of Grey Literature 2 records found  Search took 0.00 seconds. 
Focused ion beam sample preparation for transmission elektron microscopy
Krajňák, Matúš ; Matolínová, Iva (advisor) ; Matolín, Vladimír (referee)
In this work is studied preparation of specimen for transmission electron microscope (TEM). Scanning electron microscope (SEM) device combined with focused ion beam (FIB) is used. There is studied ion and electron induced deposition of P t, W a SiO2 . Lamela is miled by FIB into the specimen and it is transferred to the holder for TEM by nanomanupulating with thungsten tip. The specimen is attached to the tip and to the holder by the deposition of material. After beeing attached to the holder the specimen is thinned by FIB. The created lamelas are compared by SEM and the parameters of process are optimalised so that as few changes as possible are made to the specimen.
Focused ion beam sample preparation for transmission elektron microscopy
Krajňák, Matúš ; Matolínová, Iva (advisor) ; Matolín, Vladimír (referee)
In this work is studied preparation of specimen for transmission electron microscope (TEM). Scanning electron microscope (SEM) device combined with focused ion beam (FIB) is used. There is studied ion and electron induced deposition of P t, W a SiO2 . Lamela is miled by FIB into the specimen and it is transferred to the holder for TEM by nanomanupulating with thungsten tip. The specimen is attached to the tip and to the holder by the deposition of material. After beeing attached to the holder the specimen is thinned by FIB. The created lamelas are compared by SEM and the parameters of process are optimalised so that as few changes as possible are made to the specimen.

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2 Krajňák, Martin
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