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National Repository of Grey Literature

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Optimization of deposition parameters in order to create a photocatalytic titanium oxide films produced by PECVD PEKÁREK, Michal This thesis presents Photocatalytic TiOx layers created by own PECVD reactor assembled in the building of Department of Applied Physics and Technics. Parameters of depositions were optimalized as well as the PECVD reactor itself. Final layers are compared to layers made by Degussa P25. As a result based on the included measurements, this thesis tries to answer the question whether PECVD is the suitable method for depositions of photocatalytic layers. Detailed record

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