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National Repository of Grey Literature

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Angular distribution of backscattered electrons signal in Environmental Scanning Electron Microscopy Wandrol, Petr The aim of this work was to verify an influence of the collection solid angle on a magnitude of detected signal. The presented results of measurement were gained by an observation of the specimen of carbon covered with a thin layer of gold. The primary beam accelerating voltage was 20kV. The collection solid angle was changed by application of aluminium masks with aperture diameters 2,3,4,8,16 mm mounted on scintillator. As a working environment in the specimen chamber air and saturated water vapour were used. Detailed record

Detection of Backscattered Electrons in the Low-Energy Part of the Electron Beam Spectrum in SEM Wandrol, Petr Detailed record

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