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National Repository of Grey Literature 1 records found  Search took 0.00 seconds. 
Study of biocompatible layers TiO.sub.2./sub./Si using FTIR spectroscopy
 Zezulová, M. ; Remsa, Jan ; Jelínek, M.
There has been a great interest in research regarding titanium dioxide, especially in form of thin layers. One of the methods used to characterize this material is Fourier Transform Infrared Spectroscopy (FTIR). In this paper we report FTIR measurement results of TiO2 layers prepared by Pulsed Laser Deposition method. The layers were created on silicon (111) substrates (1x1 cm). FTIR spectrometer is based on absorption of infrared radiation and the interference process is implemented instead of classical dispersion method. This kind of spectrometer requires mathematical method of Fourier transform to gain classical spectral image. To see composition and crystalline structure the spectral region is frequently set to 600-100 cm-1. Around 50 samples were measured. Most samples were measured from different angles of incidence and with different setup (accessory). We were able to confirm different crystalline structure (anatase,rutile, and brookite)
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