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Design and Realization of the Second Generation Imaging Reflectometer and its Application in Optical Analysis of Thin Films
Vodák, Jiří ; Držík,, Milan (referee) ; Klapetek, Petr (referee) ; Ohlídal, Miloslav (advisor)
The work deals with a technique of imaging spectroscopic reflectometry developed at The Institute of Physical Engineering, Brno University of Technology. The technique is well suited for characterization of samples non–uniform along their surfaces. The technique is primarily used for optical characterization of thin films. First part of the work is focused on basic physical principles of the technique and on ways in which measurement data are obtained. It contains a basic description of evaluating methods and a basic concept of an imaging spectroscopic reflectometer with a description of main parts of such a device. The main part of the work is focused on a description of two devices which were built at The Institute of Physical Engineering together with a description of some of upgrades which were implemented to these devices during their development. A description of measurements done with the two devices is also included. Last part of the work is then focused on further development of the technique. Intention of possible evolution of the technique to imaging spectroscopic ellipsometry is proposed.
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Optimization of the imaging spectrophotometer
Vodák, Jiří ; Antoš, Martin (referee) ; Ohlídal, Miloslav (advisor)
Thesis deals with an optimization of an imaging spectrophotometer which consists of a monochromator, a CCD camera with extended detection range to UV spectra and an imaging system. Main benefits of the optimization are utilization of a new lightsource, a connection of the monochromator and the imaging system by a fibre bundle and upgrade of a sample angle adjustment system by use of a auxiliary CCD camera. More changes were made to increase accuracy of measurements and ease of use of the apparatus.
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Design of a mirror collimator for a light beam outgoing from a silica fibres bundle of a circular cross section.
Vodák, Jiří ; Brillová, Kateřina (referee) ; Ohlídal, Miloslav (advisor)
Imaging spectroscopic reflectometry is an innovative method for studying optical properties of thin layers. This method allows as studying large areas of thin layers. Imaging spectrophotometer designed in The Institute of Physical Engineering was supposed to allow measurements along areas of about 25 mm x 25 mm. However this area was not achieved. To achieve desired dimensions of the area under study it is necessary to redesign the optical transmission setup between a source of monochromatic light and the imaging spectrophotometer.The old spectrophotometer design consists only of a mirror collimator not sufficient enough to collimate a rectangle shaped light beam on the output of the monochromator. The new design will consist of optical cable of silica fibers transforming the rectangle input light beam into a light cone which will be easier to collimate by a mirror collimator.
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Design and Realization of the Second Generation Imaging Reflectometer and its Application in Optical Analysis of Thin Films
Vodák, Jiří ; Držík,, Milan (referee) ; Klapetek, Petr (referee) ; Ohlídal, Miloslav (advisor)
The work deals with a technique of imaging spectroscopic reflectometry developed at The Institute of Physical Engineering, Brno University of Technology. The technique is well suited for characterization of samples non–uniform along their surfaces. The technique is primarily used for optical characterization of thin films. First part of the work is focused on basic physical principles of the technique and on ways in which measurement data are obtained. It contains a basic description of evaluating methods and a basic concept of an imaging spectroscopic reflectometer with a description of main parts of such a device. The main part of the work is focused on a description of two devices which were built at The Institute of Physical Engineering together with a description of some of upgrades which were implemented to these devices during their development. A description of measurements done with the two devices is also included. Last part of the work is then focused on further development of the technique. Intention of possible evolution of the technique to imaging spectroscopic ellipsometry is proposed.
|
|
|
Optimization of the imaging spectrophotometer
Vodák, Jiří ; Antoš, Martin (referee) ; Ohlídal, Miloslav (advisor)
Thesis deals with an optimization of an imaging spectrophotometer which consists of a monochromator, a CCD camera with extended detection range to UV spectra and an imaging system. Main benefits of the optimization are utilization of a new lightsource, a connection of the monochromator and the imaging system by a fibre bundle and upgrade of a sample angle adjustment system by use of a auxiliary CCD camera. More changes were made to increase accuracy of measurements and ease of use of the apparatus.
|
|
|
Design of a mirror collimator for a light beam outgoing from a silica fibres bundle of a circular cross section.
Vodák, Jiří ; Brillová, Kateřina (referee) ; Ohlídal, Miloslav (advisor)
Imaging spectroscopic reflectometry is an innovative method for studying optical properties of thin layers. This method allows as studying large areas of thin layers. Imaging spectrophotometer designed in The Institute of Physical Engineering was supposed to allow measurements along areas of about 25 mm x 25 mm. However this area was not achieved. To achieve desired dimensions of the area under study it is necessary to redesign the optical transmission setup between a source of monochromatic light and the imaging spectrophotometer.The old spectrophotometer design consists only of a mirror collimator not sufficient enough to collimate a rectangle shaped light beam on the output of the monochromator. The new design will consist of optical cable of silica fibers transforming the rectangle input light beam into a light cone which will be easier to collimate by a mirror collimator.
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