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National Repository of Grey Literature 2 records found  Search took 0.00 seconds. 
Deposition of thin metal layers by vacuum magnetron sputtering device
 Rogozhnikova, Mariia ; Hylský, Josef (referee) ; Strachala, Dávid (advisor)
This bachelor’s thesis is focused on description of magnetron sputtering device NP 12 for the thin metal layers forming. In this work is mentioned the issue of metal layers, is given an overview of the methods of their forming and description of magnetron sputtering. Practical part of this thesis describes creation of the NP 12 sputtering device controlling instructions and creation of ten working samples. Copper, aluminum, and titanium layers were sputtered on a glass and silicon substrate bases. An appropriate processing parameters have been defined experimentally. The conclusion of this final work gives analyzes of surface flatness and purity of the sputtered layers using AFM and SEM measurements methods.
Detailed record
Deposition of thin metal layers by vacuum magnetron sputtering device
 Rogozhnikova, Mariia ; Hylský, Josef (referee) ; Strachala, Dávid (advisor)
This bachelor’s thesis is focused on description of magnetron sputtering device NP 12 for the thin metal layers forming. In this work is mentioned the issue of metal layers, is given an overview of the methods of their forming and description of magnetron sputtering. Practical part of this thesis describes creation of the NP 12 sputtering device controlling instructions and creation of ten working samples. Copper, aluminum, and titanium layers were sputtered on a glass and silicon substrate bases. An appropriate processing parameters have been defined experimentally. The conclusion of this final work gives analyzes of surface flatness and purity of the sputtered layers using AFM and SEM measurements methods.
Detailed record

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