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National Repository of Grey Literature 1 records found  Search took 0.00 seconds. 
Modelling of precursors for electron-beam induced deposition
 Andreides, Benjamín ; Fedor, Juraj (advisor) ; Fárník, Michal (referee)
1 Abstract FEBID (focused electron beam induced deposition) precursors are a subject of active research both in experimental and computer simulation manners. Their potential use in FEBID is strongly dependent on the completeness of the disso- ciation process caused by both primary and secondary electrons of the electron beam. This work focuses on exploration of dissociation process of iron pentacar- bonyl cation by secondary electrons in i) vacuum ii) argon cluster environment and on possibility of utilizing argon cluster with an embedded gold particle as a non-covalently bonded precursor for FEBID. These systems will be inspected via means of the classical and reactive molecular dynamics using the rCHARMM force field. 1
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