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Příprava tenkých funkčních TCO vrstev a jejich analýza pro elektrochemickou senzoriku
ŠIMEROVÁ, Radka
The aim of this thesis is study, preparation and investigation of thin films from the family of conductive oxides, which are transparent in the visible region of the spectrum, in order to create electrochemically active transparent electrodes with multipurpose applicability. The layers were prepared by a magnetron sputtering using low-temperature plasma discharge. Indium doped Tin Oxide (ITO), which belongs to the mentioned group of oxides, was deposited on silicon and glass substrates in a variety of conditions in the deposition system. The attention was paid to the dependence of the electrochemical activity of the produced films on their thickness and ex-situ thermal annealing during the optimization of deposition conditions. However, the main motivation of the research was to investigate the influence of methods focused on energy supply to the deposited layers, i.e. the influence of working gas pressure, the presence of in-situ annealing during the deposition, and the different power sources connected to the magnetron. In order to investigate the electrochemical properties of the layers, a system for measuring cyclic voltammetry, one of the most common electrochemical methods with high sensitivity, was implemented.
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