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Measurement of mechanical properties of thin films using the bulge test technique
 Holzer, Jakub ; Cieslar, Miroslav (referee) ; Kruml, Tomáš (advisor)
Main objective of this diploma thesis is to finish a construction of the Bulge test apparatus for measurement of thin films, perform first tests on commercially available Si3N4 membranes and bilayer membrane with aluminium. First part of the thesis is focused mainly on literature review of current knowledge regarding this topic and other methods of thin films testing. Experimental part deals with construction of apparatus, methodology of data evaluation and results of the measurement. The thin films of interest are fabricated as amorphous silicon nitride or bilayer of mentioned nitride and either aluminium, titanium or Ta-B-C layer. The apparatus has been built in house in collaboration with Institute of Scientific Instruments of CAS. Both reliability and repeatability of this method has been tested on over 160 measurements of commercially available membrane. The results of measurements are compared with literature and nanoindentation test. More detailed data analysis is currently under development with colleagues at Institute of Physics of Materials. It has been proven beyond doubt that Bulge test method and constructed apparatus are suitable for the measurement of several mechanical properties of thin films.
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