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The surface quality of the fused silica machined by ultrafast laser
 Novotný, Jan ; Mrňa, Libor
The quality of ultrafast laser-machined surfaces depends on several process parameters. In the experiment, the parameters window that yields the lowest roughness and lowest number of defects were found. The most important parameter after laser fluence is scan line overlap, which has the biggest impact on residual heat dissipation and related stresses in the specimen. The second harmonic wavelength yielded 10 % better surface roughness, lower waviness, and a lower number of defects on the surface and edges of the processed area.
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