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The deposition of thin films by the ion sputtering IBS/IBAD Hudeček, Jan ; Pavera, Michal (referee) ; Dvořák, Petr (advisor) The submitted bachelor’s thesis are dealed with concept and design of holder of new palette, which is determine for deposition equipment, which belongs to institue of physical engineering and which is called as Kaufmann. Introductory chapters of bachelor’s thesis deals about possibilities of production of thin films, ways of growth of thin films and introduction to vakuum physics. Next chapter is given to current deposition and current deposition equipment Kaufmann. In the next chapter are descriptions of construct solution of holder of new palette and construct solution of palette. The last chapter is given to calibration and optimalization of deposition with new palette. Detailed record

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