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National Repository of Grey Literature

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Fabrication of nanostructures using wet chemical etching Musálek, Tomáš ; Šamořil, Tomáš (referee) ; Kolíbal, Miroslav (advisor) This bachelor's thesis deals with wet anisotropic etching of silicon and germanium. Two different approaches to the formation of anisotropic etch pits are shown. The supporting activities required for etching procedure are described. Especially, preparation of mask by electron beam litography, etching of SiO2 resp. GeO2 and application of metal particles. Detailed record

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