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National Repository of Grey Literature

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Comparison of properties of thin layers of titanium, nickel and silver used in semiconductor technology Dorotík, David ; Prášek, Jan (referee) ; Hejátková, Edita (advisor) Bachelor theses were connected with knowledge of general problems of application of thin films by methods of sputtering and evaporation. Prepare the substrate and clean it before depositing thin layers. The work was focused on the properties of these thin films in semiconductor technology. Detailed record

Comparison of properties of thin layers of titanium, nickel and silver used in semiconductor technology Dorotík, David ; Prášek, Jan (referee) ; Hejátková, Edita (advisor) Bachelor theses were connected with knowledge of general problems of application of thin films by methods of sputtering and evaporation. Prepare the substrate and clean it before depositing thin layers. The work was focused on the properties of these thin films in semiconductor technology. Detailed record

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