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In-situ characterization of semiconductors using scanning probe microscopy techniques
Očkovič, Adam ; Pléha, David (referee) ; Pavera, Michal (advisor)
The thesis focuses on the analysis of semiconductor components using scanning probe microscopy. In the first part, crystalline substances are classified according to their electrical properties. Then, the theory of intrinsic and extrinsic semiconductors, PN transitions and finally the basic types and functions of transistors are introduced. In the second section, SPM techniques and their principles of operation are presented, which are suitable for failure analysis of semiconductor devices. The third chapter introduces the measurement setup, which consists of a scanning electron microscope MIRA and a scanning probe microscope LiteScope, which uses self-sensing probes. In the fourth chapter, the semiconductor samples analyzed were tungsten plugs in a cross-section of CMOS chip, a cross-section of bipolar transistor, and a lamella of unipolar MOSFET transistor. Analysis of these samples was performed using AFM, CAFM, EFM, KPFM and SSRM techniques in the last chapter. For each technique and sample, an analysis of the measured data was performed. Together with the techniques, the basic limitations and interesting outputs for failure analysis were presented.
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Self-sensing SPM probes for measuring electrical properties of materials
Očkovič, Adam ; Vařeka, Karel (referee) ; Pavera, Michal (advisor)
The bachelor's thesis is focused on the modification of probes with an integrated sensor usable for measuring conductivity characteristics of surfaces in atomic force microscopy. The first part presents the theory concerning atomic force microscopy, conductivity measurement and deposition using an ion beam. Furthermore, the method of production and limitation of the use of electrically conductive probes with optically read deflection is described. The practical part presents the main problems of probes with integrated sensors in conductivity measurements. Furthermore, the modification of the probes themselves, the measurements made with these probes and suggestions for improving the properties of the probes are described.
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Self-sensing SPM probes for measuring electrical properties of materials
Očkovič, Adam ; Vařeka, Karel (referee) ; Pavera, Michal (advisor)
The bachelor's thesis is focused on the modification of probes with an integrated sensor usable for measuring conductivity characteristics of surfaces in atomic force microscopy. The first part presents the theory concerning atomic force microscopy, conductivity measurement and deposition using an ion beam. Furthermore, the method of production and limitation of the use of electrically conductive probes with optically read deflection is described. The practical part presents the main problems of probes with integrated sensors in conductivity measurements. Furthermore, the modification of the probes themselves, the measurements made with these probes and suggestions for improving the properties of the probes are described.
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