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Deposition of magnetic nanostructures using EBID and optimalization of their chemical composition and morphology
Vyroubal, Ondřej ; Kolíbalová, Eva (referee) ; Kolíbal, Miroslav (advisor)
This master's thesis deals with deposition of cobalt nanostructures using Electron Beam Induced Depositon (EBID). The thesis firstly describes theoretical background regarding EBID. In the following experimental part, the deposition process is optimized via analysis of exposition parameters and their influence on the final shape of nanostructures. These are analyzed via Atomic Force Microscopy (AFM). Optimized exposure parameters are then applied to the deposition of functional 3-dimensional nanostrucutres. In particular, the deposition of cobalt spheres. The elemental composition is analyzed by the means of element composition using Energy-dispersive X-ray Spectroscopy (EDX) and the nanostructures of desired morphologies are studied with Magnetic Force Microscopy (MFM) and Magneto-Optical Kerr Microscope).
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Electrotransport properties of the nanostructures fabricated by the FIB
Ostřížek, Petr ; Kolíbalová, Eva (referee) ; Urbánek, Michal (advisor)
The aim of this work is fabrication of nanostructures and measurement of their electrotransport properties. There are two different methods used for fabrication - electron beam lithography with sputtering of thin films and focused ion beam with deposition from gas phase. I-V characteristic was measured for characterisation of as prepared nanostructures - wires. Material of wires prepared by using of electron beam lithography was permalloy - an alloy of iron and nickel. Second types of wires prepared by using of chemical vapor deposition induced by focused ion beam was platinum based.
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Deposition of magnetic nanostructures using EBID and optimalization of their chemical composition and morphology
Vyroubal, Ondřej ; Kolíbalová, Eva (referee) ; Kolíbal, Miroslav (advisor)
This master's thesis deals with deposition of cobalt nanostructures using Electron Beam Induced Depositon (EBID). The thesis firstly describes theoretical background regarding EBID. In the following experimental part, the deposition process is optimized via analysis of exposition parameters and their influence on the final shape of nanostructures. These are analyzed via Atomic Force Microscopy (AFM). Optimized exposure parameters are then applied to the deposition of functional 3-dimensional nanostrucutres. In particular, the deposition of cobalt spheres. The elemental composition is analyzed by the means of element composition using Energy-dispersive X-ray Spectroscopy (EDX) and the nanostructures of desired morphologies are studied with Magnetic Force Microscopy (MFM) and Magneto-Optical Kerr Microscope).
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Electrotransport properties of the nanostructures fabricated by the FIB
Ostřížek, Petr ; Kolíbalová, Eva (referee) ; Urbánek, Michal (advisor)
The aim of this work is fabrication of nanostructures and measurement of their electrotransport properties. There are two different methods used for fabrication - electron beam lithography with sputtering of thin films and focused ion beam with deposition from gas phase. I-V characteristic was measured for characterisation of as prepared nanostructures - wires. Material of wires prepared by using of electron beam lithography was permalloy - an alloy of iron and nickel. Second types of wires prepared by using of chemical vapor deposition induced by focused ion beam was platinum based.
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