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Fabrication of SiC optical metasurfaces
 Štálnik, Jozef ; Idesová, Beáta (referee) ; Dvořák, Petr (advisor)
The aim of this bachelor's thesis was to optimize the manufacturing process of SiC meta-surfaces, which have emerged as a revolutionary replacement for classical optical elements due to their ability to control incident light through local phase modulation. Furthermore, it discusses the utilization of silicon carbide as a platform for these photonic devices and the experimental techniques employed in the meta-surface fabrication process. The experimental section presents the results of silicon carbide nanostructure fabrication, with dry plasma etching being the key optimization step. Finally, optical measurements of the phase profile of the resulting meta-surfaces are presented using off-axis digital holography. The main outcome of this work is the creation of a library of individual building blocks crucial for future applications.
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