Kontrola magnetické anizotropie v multivrstvách Pt/Co/Pt

Nowak, Lukáš

This thesis aims to explore the effect of in situ ion gun etching on magnetic proper- ties, such as perpendicular magnetic anisotropy, of Pt/Co/Pt multilayers. Perpendicular magnetic anisotropy is of interest due to its importance in spintronic application. Calibration spectroscopic ellipsometry measurements of Pt and Co layers to obtain sputter yields of respective magnetron targets were performed as a first step. After that, ten Pt/Co/Pt multilayers with different Co and top Pt layer thicknesses were prepared. Five of these samples were etched by the ion gun, mounted inside of the magnetron chamber, during different stages of the deposition. To characterize the prepared samples, experimental and modeled Kerr rotation spectra were confronted. This provided an insight into the cross-sections of the investigated samples. Magnetic hysteresis loops measured by vibrating sample magnetometer and Kerr rotation setup demonstrated higher coercive field and change of the slope of the loop induced by ion etching. When compared to the obtained cross-sections, a correlation between the change of magnetic loops and intermixing of Pt and Co at the interface was visible. This intermixing was higher in samples treated by the ion gun. 1

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