Original title: SMV-2020-45: Speciální mutlivrstvy TiO2/SiO2 pro sensorické aplikace
Translated title: SMV-2020-45: Custom TiO2/SiO2 multilayer coatings for optical sensing
Authors: Oulehla, Jindřich ; Pokorný, Pavel
Document type: Research reports
Year: 2020
Language: cze
Abstract: [cze] [eng]
Konstrukce, vývoj a depozice vzorků interferenčních filtrů pomocí technologie vakuového napařování elektronovým svazkem. Depozice je provedena na substráty dodané zákazníkem. Design, development and deposition of interference filters using vacuum electron beam evaporation. The filters are deposited on substrates supplied by the customer.
Keywords: e-beam evaporation; interference filters; thin film optics

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0313882

Permalink: http://www.nusl.cz/ntk/nusl-432587


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Research > Institutes ASCR > Institute of Scientific Instruments
Reports > Research reports