Original title:
Analysis of a combined electrostatic and magnetic objective lens
Authors:
Konvalina, Ivo ; Müllerová, Ilona Document type: Papers Conference/Event: Mikroskopie 2010, Nové Město na Moravě (CZ), 2010-02-17 / 2010-02-18
Year:
2010
Language:
eng Abstract:
Cathode lens (CL) is an electron optical element commonly used in the photoemission electron microscopy (PEEM), low energy electron microscopy (LEEM) and last but not least in the scanning electron microscope (SEM). ens. The sequential arrangement of electrostatic and magnetic fields was considered.
Keywords:
EOD software; low energy electron microscopy; photoemission electron microscopy Project no.: CEZ:AV0Z20650511 (CEP), IAA100650902 (CEP) Funding provider: GA AV ČR Host item entry: Mikroskopie 2010, ISBN N
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0006219