Original title:
How to Prevent Hydrocarbon Contamination in SEM
Translated title:
Prevence tvorby uhlovodíkové kontaminace v SEM
Authors:
Dvořáková, Marie ; Mika, Filip Document type: Papers Conference/Event: International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /11./, Skalský dvůr (CZ), 2008-07-14 / 2008-07-18
Year:
2008
Language:
eng Abstract:
[eng][cze] Electron beam-induced contamination is one of the most undesirable effects in SEM. In this work the contamination was formed on silicon wafer, copper, aluminium, stainless plate and nickel samples. The contamination was removed by the plasma cleaning (XEI Scientific Evactron De-Contaminator).Kontaminace indukovaná elektronovým svazkem je jedním z nežádoucích efektů v SEM. V této práci byla kontaminace tvořena na vzorcích křemíku, mědi, hliníku, oceli a niklu. Kontaminace byla odstraněna metodou plazmového čištění (XEI Scientific Evactron De-Contaminator).
Keywords:
contamination; Evactron; plasma cleaning; scanning electron microscope Project no.: CEZ:AV0Z20650511 (CEP) Host item entry: Proceedings of the 11th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, ISBN 978-80-254-0905-3
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0165648