Original title: Real time observation of strain in the SEM sample
Authors: Piňos, Jakub ; Frank, Luděk
Document type: Papers
Conference/Event: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, Skalský dvůr (CZ), 20180604
Year: 2018
Language: eng
Abstract: The SEM with various detector arrangements and analytical attachments represents an\nirreplaceable tool in material research. One of the techniques available in most contemporary\nmicroscopes is the scanning low energy electron microscopy (SLEEM) with biased specimen, marketed as the beam deceleration mode, gentle beam and others. The SLEEM allows\ncontrolling the information depth of the backscatter electron (BSE) imaging within a wide\nrange by altering the landing energy of electrons.
Keywords: deformation; SEM; SLEEM
Host item entry: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar, ISBN 978-80-87441-23-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0287626

Permalink: http://www.nusl.cz/ntk/nusl-387509


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers