Original title:
Scintillation Secondary Electron Detector in Environmental SEM
Translated title:
Scintilační detektor sekundárních elektronů v EREM
Authors:
Jirák, Josef ; Linhart, Jan ; Neděla, Vilém ; Černoch, P. ; Špinka, J. Document type: Papers Conference/Event: Multinational Congress on Microscopy /8./, Prague (CZ), 2007-06-17 / 2007-06-21
Year:
2007
Language:
eng Abstract:
[eng][cze] In the presented scintillation secondary electron detector, the scintillator room is separated from the specimen chamber (see Fig. 1) by two apertures of several hundred micrometers in diameter.V presentovaném scintilačním detektoru sekundárních elektronů je komora scintilátoru oddělena od komory vzorku pomocí dvou clonek o průměru několik stovek mikrometrů.
Keywords:
environmental SEM; scintillation; secondary electron detector Project no.: CEZ:AV0Z20650511 (CEP), GA102/05/0886 (CEP) Funding provider: GA ČR Host item entry: Proceedings of the 8th Multinational Congress on Microscopy, ISBN 978-80-239-9397-4
Institution: Institute of Scientific Instruments AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0152595