Original title: SMV-2017-27: Charakterizace vzorků s deponovanými tenkými vrstvami
Translated title: SMV-2017-27: Characterization of samples with thin layers
Authors: Horáček, Miroslav ; Kolařík, Vladimír ; Matějka, Milan ; Krátký, Stanislav ; Chlumská, Jana ; Meluzín, Petr ; Král, Stanislav
Document type: Research reports
Year: 2017
Language: cze
Abstract: [cze] [eng]

Keywords: e-beam lithography; microstructures; optics; thin layers

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0278778

Permalink: http://www.nusl.cz/ntk/nusl-370721


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Research > Institutes ASCR > Institute of Scientific Instruments
Reports > Research reports
 Record created 2017-12-20, last modified 2021-11-24


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