Original title: Piezoelektrické rezonátory MEMS pro senzorické aplikace
Translated title: Piezoelectric MEMS resonators for sensing applications
Authors: Klempa, Jaroslav ; Svatoš, Vojtěch (referee) ; Gablech, Imrich (advisor)
Document type: Bachelor's theses
Year: 2017
Language: cze
Publisher: Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Abstract: [cze] [eng]

Keywords: MEMS; micromachining; piezoelectricity; resonant frequency; resonator; thin films; MEMS; mikroobrábění; piezoelektřina; rezonanční frekvence; rezonátor; tenké vrstvy

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/68114

Permalink: http://www.nusl.cz/ntk/nusl-320223


The record appears in these collections:
Universities and colleges > Public universities > Brno University of Technology
Academic theses (ETDs) > Bachelor's theses
 Record created 2017-06-12, last modified 2022-09-04


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