Název:
Scanning electron microscopy with low energy electrons
Autoři:
Mika, Filip Typ dokumentu: Příspěvky z konference Konference/Akce: STUDENT EEICT 2003, Brno (CZ), 2003-04-24
Rok:
2003
Jazyk:
eng
Abstrakt: A method of scanning electron microscopy (SEM) of nonconductive specimens, based on measurement and utilisation of the critical energy of electron impact, is described in detail together with examples of its application. The critical energy, at which the total electron yield curve crosses the unit level, is estimated on the base of measurement of the time development in the image signal from beginning of irradiation. The method is programmed and implemented as a module to the controlling software of the micropscope type VEGA, where it secures fast search for the critical energy value.
Klíčová slova:
critical energy; nonconductors; scanning electron microscopy Číslo projektu: CEZ:AV0Z2065902 (CEP), KJB2065301 (CEP) Poskytovatel projektu: GA AV ČR Zdrojový dokument: Proceedings of the International Conference and Competition Student EEICT 2003, ISBN 80-214-2401-X
Instituce: Ústav přístrojové techniky AV ČR
(web)
Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0101282