Original title: High resolution field emission scanning electron microscope JSM 6700 in ISI AS CR Brno - first experience and results with the instrument operation
Authors: Matějková, Jiřina ; Rek, Antonín
Document type: Papers
Conference/Event: Role of physics in future applications: from nanotechnology to macroelectronics, Tři Studně (CZ), 2002-06-10 / 2002-06-15
Year: 2002
Language: eng
Abstract: JSM6700F is an ultra high resolution FE SEM suitable for observation of fine structures such as mutilayeres film and nano particles fabricated by the nanotechnology. This JEOL microscope is at ISI ASCR Brno in experimental operation since the beginning of 2002. Its possibilities have been tested on first specimens with submicron structures.
Keywords: high resolution FE SEM; nano technology
Project no.: CEZ:AV0Z2065902 (CEP)
Host item entry: International summer school: Role of physics in future applications: from nanotechnology to macroelectronics

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0101223

Permalink: http://www.nusl.cz/ntk/nusl-29587


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers