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> SMV-2016-02: Lift-off technologie pro metalické mikrostruktury
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Original title:
SMV-2016-02: Lift-off technologie pro metalické mikrostruktury
Translated title:
SMV-2016-02: Lift-off technology for metallic microstructures
Authors:
Krátký, Stanislav
;
Kolařík, Vladimír
;
Horáček, Miroslav
;
Matějka, Milan
;
Chlumská, Jana
;
Meluzín, Petr
;
Král, Stanislav
Document type:
Research reports
Year:
2016
Language:
cze
Abstract:
[cze]
[eng]
Výzkum a vývoj v oblasti přípravy metalických mikrostruktur na kovové podložce.
Research and development in the field of metallic microstructures on copper substrate.
Keywords:
e-beam lithography
;
lift-off technology
;
metallic microstructure
;
reactive ion etching
Institution:
Institute of Scientific Instruments AS ČR (
web
)
Document availability information:
Fulltext is available at the institute of the Academy of Sciences.
Original record:
http://hdl.handle.net/11104/0266240
Permalink:
http://www.nusl.cz/ntk/nusl-262482
The record appears in these collections:
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>
Institutes ASCR
>
Institute of Scientific Instruments
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>
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Record created 2017-01-11, last modified 2021-11-24
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