Original title: Plasma diagnostics by energy-resolved mass spectroscopy of ions during triode ion plating of TiN films
Authors: Kadlec, Stanislav ; Maček, M. ; Wouters, S. ; Navinšek, B. ; Paujan, P. ; Quaeyhaegeis, C. ; Stals, L. M.
Document type: Papers
Conference/Event: Conference on Controlled Fusion and Plasma Physics /25./ (1998 ICPP), Praha (CZ), 1998-06-29 / 1998-07-03
Year: 1998
Language: eng
Project no.: GV106/96/K245 (CEP), HTECH.CRG970529
Funding provider: GA ČR, NATO - Collab research grant
Host item entry: International Congres on Plasma Physics

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0029682

Permalink: http://www.nusl.cz/ntk/nusl-21785


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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers