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Electrostatic Deflection and Correction Systems
Badin, Viktor ; Oral, Martin (referee) ; Zlámal, Jakub (advisor)
The aim of this master's thesis is to explore and study dynamic aberration correction options in electron-beam lithography systems. For the calculations, the thesis uses the optical column of the BS600 electron-beam writer. The thesis focuses on corrections of the third order field curvature, astigmatism, and distortion aberrations of the currently used magnetic deflection system and a newly designed electrostatic deflection system. The parameters of the two deflection and correction systems were compared.
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The Catadioptric System of G.M. Popov of the Observatory of Úpice
Rail, Zdeněk ; Melich, Zbyněk
During the Sixties of the Twentieth Century series of two-mirror catadioptric telescopes were designed with a correcting lens in front of their secondary mirror. One of the first designers of these devices was P.P. Argunov. His optical designs were further developed by G.M. Popov, J. Klevcov and other opticians. In 2005 one telescope of a Popov system of diameter 305 mm was manufactured in the Development Optical Workshop of Academy of Sciences of Czech Republic /now Institute of Plasma Physics of AS CR,v.v.i.-Toptec/ in Turnov. The telescope was intended to substitute an older Maksutov-Cassegrain telescope of diameter of 260 mm of the Observatory in Úpice which required the reconstruction. In this paper we present an optical design of the Popov´s system of the Observatory in Úpice and compare it with an equal commercial Schmidt-Cassegrain telescope and further devices.\n
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Electrostatic Deflection and Correction Systems
Badin, Viktor ; Oral, Martin (referee) ; Zlámal, Jakub (advisor)
The aim of this master's thesis is to explore and study dynamic aberration correction options in electron-beam lithography systems. For the calculations, the thesis uses the optical column of the BS600 electron-beam writer. The thesis focuses on corrections of the third order field curvature, astigmatism, and distortion aberrations of the currently used magnetic deflection system and a newly designed electrostatic deflection system. The parameters of the two deflection and correction systems were compared.
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